Mainframe of substrate processing system



FIG. 1 is a top perspective view of a mainframe for substrate processing system of the present design.

FIG. 2 is a side view thereof.

FIG. 3 is a side view thereof.

FIG. 4 is a front view thereof.

FIG. 5 is a rear view thereof.

FIG. 6 is a top view thereof.

FIG. 7 is a bottom view thereof; and,

FIG. 8 is a top perspective view thereof, showing unclaimed components attached thereto.

The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design. 

CLAIM The ornamental design for a mainframe of substrate processing system, as shown and described. 